Method of producing multi-layer structure

ABSTRACT

A method of producing metal-insulator-semiconductor structures, wherein an insulating layer is etched using a conductor layer formed on a selected area of the insulating layer as a mask, and a peripheral edge projection of the conductor layer caused by side etching of the side portion of the insulating layer during the etching step is completely converted into an insulator, whereby the destruction of the gate of the structure is prevented.

United States Patent [1 1 Anzai et al.

1 Sept. 23, 1975 METHOD OF PRODUCING MULTI-LAYER STRUCTURE Inventors: Norio Anzai, Tokorozawa; Akihiro Tomozawa; Masayasu Tsunematsu, both of Kodaira; Yasushi Matsui, Tokyo, all of Japan Assignee: Hitachi, Ltd., Japan Filed: Oct. 29, 1973 Appl. N0.: 410,445

Foreign Application Priority Data Oct, 27, 1972 Japan 47-107222 US. Cl. 29/571; 29/578; 29/580;

29/591 Int. Cl. BOLI 17/00 Field of Search 29/571, 578, 579, 580,

References Cited UNITED STATES PATENTS 4/1966 Adam et al. .4 29/580 X 3,397,448 8/1968 Tucker .1 29/580 X 3,549,437 12/1970 Steppberger et al..,. 29/579 X 3.764.865 10/1973 Napoli et a1. 29/578 X 3,775,191 11/1973 McQuhae 29/571 X 3,798,752 3/1974 Fujimoto .1 29/571 Primary ExaminerRoy Lake Assistant Examiner-Craig R. Feinberg Attorney, Agent, or FirmCraig & Antonelli [57] ABSTRACT A method of producing metal-insulator-semiconductor structures, wherein an insulating layer is etched using a conductor layer formed on a selected area of the insulating layer as a mask, and a peripheral edge projection of the conductor layer caused by side etching of the side portion of the insulating layer during the etching step is completely converted into an insulator, whereby the destruction of the gate of the structure is prevented.

9 Claims, 12 Drawing Figures US Patent Se t. 23,1975 Sheet 1 055 3,906,620

FIG. la 38 PRIOR ART FIG. lb

US Patent se :v 23.1075 Sheet 2 of 5 3,906,620

FIG. 2d Q; g 31(6 N2 N FIG. 2e p US Patent Sept. 23,1975 Sheet 3 of5 3,906,620

FIG. 3

WetOz (TOFIBGOZU m w w W 0 dryOz (940C) WetO2(Tox=l580A) Tox THE THICKNESS OF THE OXIDE FILM WeiOz Tox=l I003) MINUTE) OXIDATION TIME mu. 0 0 0 m H n u m0. O OJOImUmIF US Patent Sept. 23.1975 Sheet 4 of 5 3,906,626

FIG. 4

dryOz (940C) dryO2(l00OC) O Tox=l050A Wei O2 (940C) I000 I500 THE THICKNESS OF THE OXIDE FILM L. O A

US Patent Sept. 23,1975 Sheet 5 of5 3,906,620

FIG. 5

Tox=l360 K 940C wetoz T0x= I I00 A f0 OXIDATION Tl ME 30 (MINUTE) a 0 a. u

METHOD OF PRODUCING MUL'I'I-LAYER STRUCTURE CROSS REFERENCE TO RELATED APPLICATION This application is related to subject matter de scribed in copending US application Scr. No. 400,924, filed Sept. 26, 1973, entitled METHOD OF PRODUCING MIS STRUCTURE by Akira Nagase, Masayasu Tsunematsu, Norio Anzai and Akihiro Tomozawa and assigned to the same assignee as the present application.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of producing a multilayer structure having a substrate of a semiconductor. More particularly, the method is mainly directed to a silicon gate MOS-type semiconductor device,

2. Description of the Prior Art In general, in a semiconductor device having an insulated gate, such as a MOS field-effect transistor (MOS- FET), the SiO (silicon dioxide) film constituting an insulating portion is very thin. For this reason, even only a very slight voltage, generated in the gate, is liable to cause dielectric breakdown of the gate. As the countermeasure against this, the gate may be protected in such way that a surface breakdown diode is arranged in parallel with the gate or that a series resistance is employed. In a silicon gate MOS field-effect transistor which uses polycrystalline silicon for the gate, a similar countermeasure against gate destruction has heretofore been taken. It has been revealed, however, that the gate is not satisfactorily protected by such method. In more detail, in the manufacture of the Si gate MOS- FET, an SiO film on source and drain regions is selectively etched using the Si gate as a mask. When forming the Si gate, as illustrated in FIG. la a polycrystalline Si layer 40 is first photoctched, and an underlying gate SiO layer 3a is subsequently etched. The gate SiO- layer 31: therefore is side etched, with the result that the overlying polycrystalline Si layer 411 projects in the form of a pent roof at the periphery of the gate SiO layer. Beneath such a pent roof (shown at 412 in the figure), it is difficult to sufficiently form an SiO layer 8 by the CVD (chemical vapor deposition) process employed during the succeeding steps of manufacture. Foreign matter is also prone to be concentrated here, Furthermore, since the pent roof 4b is acute at its front end, the electric field concentration is easily increased at this part, and it is easily broken by a slight external shock or the like. These drawbacks lead to the causes of short-circuits.

It has been revealed that, when the pent roof is formed in the Si gate, the dielectric breakdown is liable to occur at this part even for a low gate voltage due to the reasons stated above. As a result, the inventors subjectcd a number of completed Si gate MOSFETs to an experiment in which test pieces whose gate breakdown voltages were lower than a certain standard value were rejected by the voltage screening test. Where the test pieces were 200 bit shift registers, the percent defective was 4 to 5'71. Such test requires a considerable amount of time and lowers the yield due to the test itself; moreover, it results in high cost. In view of these disadvantages, the present invention has been made as a method which eliminates the necessity for using such a test.

SUMMARY OF THE INVENTION The objects of the present invention are (I) that the rate of destruction of gates is diminished in semiconductor devices having MOS construction, broadly MIS construction, (2) that since the voltage screening test shows that the proportion of defective semiconductor products of MIS construction is, for example, below 0.1% for 200 bit shift registers, the voltage screening test becomes unnecessary, (3) that a gate electrode as well as an interconnection layer made of polycrystalline silicon and an interconnection layer made of alluminum in a silicon gate MOSFET are prevented from being short-circuited to each other, and (4) that the conditions of oxidizing the pent roof of a silicon gate are varied in the silicon gate MOSFET, whereby the threshold voltage V of the device is adjusted to a desired value.

The fundamental aspect of the present invention for accomplishing the above-mentioned objects consists in a method of producing a multi-layer structure having a construction in which a conductor layer is included over a semiconductor substrate with an insulating layer interposed therebetwccn and in which the insulating layer is etched using the partially formed conductor layer as a mask, characterized in that the surface of the conductor layer is converted into an insulator to such an extent that a peripheral edge projection (pent roof) of the conductor layer which arises from side etching of the side portion of the insulating layer at the aforesaid etching step is completely converted into the insulator.

Another aspect of the present invention consists in a method of producing a multi-layer structure in which a polycrystalline Si layer is provided over an Si substrate with an SiO layer interposed therebetwccn and for which, using the partially formed Si layer as a mask, the SiO layer is etched to form an Si gate electrode, characterized in that the surface of the Si layer is oxidized to such extent that a peripheral edge projection of the Si layer which arises due to side etching of the side portion of the SiO layer during the aforesaid etching step is completely converted into SiO that an insulating layer is thereafter covered and formed externally, and that wiring layers made of a metal are further formed on predetermined areas.

BRIEF DESCRIPTION OF THE DRAWINGS FIGS. la and lb illustrate the essential portions of the MOS construction for explaining the basic construction of the present invention, in which FIG. 1a is a vertical sectional view of the portions in the case of manufacture by a prior-art method, while FIG. lb is a vertical sectional view of the portions in the case of manufac ture by the method of the present invention;

FIGS, 2a to 2g are sectional views showing various steps of manufacture of an embodiment of the present invention; and

FIGS. 3 to 5 are curve diagrams for explaining the effeet of the present invention, in which FIG. 3 illustrates the relationship between V,,, and the oxidizing time, FIG. 4 illustrates the relationship between V and the thickness of an oxide film, and FIG. 5 illustrates the relationship between the reduction of V and the oxidizing time.

PREFERRED EMBODIMENTS OF THE INVENTION The present invention will be concretely described hereunder along the preferred embodiments,

FIGS. 2a to 2g show manufacturing steps in the case where the present invention is applied to a P-channel Si gate MOSFET. The various producing steps (u) to (g) are as follows:

a. An n-type silicon substrate 1 having a specific resistance of about 8 wcm is prepared. It is heated in an oxidizing atmosphere at approximately 1,200C., thereby to form a first thermal oxidation film 2 in the surface of the substrate to a thickness of about [4,000 A. Subsequently, that part of the thermal oxidation film 2 which corresponds to the source, drain and gate regions to be formed is removed by photoetching techniques.

b. Oxidation is again carried out in the oxidizing atmosphere at approximately l,200C., to form a second thermal oxidation film 3 having a thickness about 1,250 l ,300 A on the substrate surface exposed by the step (a). The second thermal oxidation film is used as a gate insulating film. ln consideration of the fact that the threshold voltage V is lowered by the third thermal oxidation at a step (e) to be explained below, the thickness of the second thermal oxidation film is corrected so as to be larger by 250 300 A than in the usual case. Such larger thickness, however, is not always neces sary. In case it is desired to suitably lower the threshold voltage V,,,, the thickness of the oxide film, the oxidizing atmosphere, the oxidation temperature and/or the oxidation time may be approximately varied.

c. Using the CVD process, Si produced by thermally decomposing SiH, (monosilane) at about 600C, is deposited on the entire surface of the resultant substrate to a thickness of approximately 5,000A. Thus, a polycrystalline Si layer 4 is formed.

d. The polycrystalline Si layer 4 and the second thermal oxidation film 3 are selectively removed by photoetching. to provide windows for source and drain regions. Boron, for example. is subsequently diffused as an acceptor. to thereby form source region 5 and drain region 6 which are p-type diffused layers (about 8,000 A thick). During this step, an Si gate electrode 40 made from the polycrystalline Si layer is formed. In this respect. a pent roof 4/1 is formed at the peripheral edge part of the Si gate electrode due to side etching during the etching of the second thermal oxidation film 3.

e. thermal oxidation of the surface of the Si gate (the third thermal oxidation) is carried out in an oxidizing atmosphere at approximately 940C. Here, the thermal oxidation is effected so that, as illustrated in FIG. lb, the resulting thermal oxidation film 7 may extend in side the Si gate electrode 4a or the thermally-oxidized gate film 7 over the gate film 3a, in other words, to the extent that the pent roof 4a is perfectly oxidized. Since, as stated above, oxidation is carried out at the compar atively low temperature of 940C., the oxidizing treat ment hardly gives rise to re-diffusion of the source region 5 and the drain region 6, so that it is merely the threshold voltage V which is slightly lowered. As ex plaincd previously, the lowering of V is corrected beforehand by the thickness of the gate oxide film. The oxide films 7 are also formed in the surfaces of the source and drain by the third thermal oxidation treatment.

f. Using the CVD process, SiO produced by the low temperature oxidation of SiH, at about 450C. is deposited over the entire surface. Thus, a CVD oxide film 8 being approximately 8,000A thick is formed.

g. Using photoetching techniques, the CVD oxide film 8 is formed therein with contact holes for the source region 5, drain region 6 and the gate (the contact hole for the gate is not shown). Aluminum is evaporated on the entire surface, and wiring layers 9 of a predetermined pattern are formed by photoetching.

In accordance with the construction of the present invention as described above, the objects can be achieved and the effects are produced as will be stated hereunder.

l. The pent roof 4b of the polycrystalline Si layer is perfectly oxidized during step (e). Therefore, even where the material SiO of the oxide film 8 by the CVD process is produced in an imperfect state under the pent roof, or where imperfections concentrate on that part, the gate voltage is never applied directly to a pent roof. Consequently, the gate portion does not become a cause of dielectric breakdown. Moreover, the front end of the pent roof of the gate portion (electrically conductive part) does not have an acute-angle, so that concentration of the electric field does not readily occur. Even if the pent roof part is broken due to an external force, dielectric breakdown is prevented due to the presence of the oxide film.

2. For the reasons discussed in item l gate destruction decreases, and the defective percent measured by the voltage screening process becomes below 0.1%. As a consequence, the necessity for effecting the voltage screening process is eliminated, and this process can be omitted.

3. The polycrystalline Si layer of the gate electrode becomes surrounded by the thermal oxidation films of fine structure. Therefore, when compared with the construction, as in the prior art, in which only the comparatively porous SiQ- produced by the CVD process exists around the polycrystalline Si, the construction of the present invention remarkably reduces the generation of short-circuits between a polycrystalline Si wiring (namely, an Si wiring continuous to the gate) and the Al wiring formed over the gate through the CVD oxide film 8.

4. As illustrated in FIGS. 3 to 5, it is apparent that, as the depth of the surface oxidation of the pent roof portion of the polycrystalline Si layer of the gate electrode is larger, the threshold voltage V becomes lower. The changes in V,,, differ in dependence on the oxidation time, the thickness of the gate oxide film (especially, the secondary oxide film), the state of the at mosphere or the oxidation temperature. V can be controlled to a desired value by appropriately combining and controlling the conditions. As known from curves in FIGS. 3 to 5, a P-channel MOS structure of the depletion mode with a desired characteristic can be produced by setting the thickness of the oxide film or the oxidizing period of time at an appropriate value.

In addition to the foregoing embodiment, the present invention has the aspects of performance as mentioned below.

1. For the gate electrode. there may be employed another substance adapted to be converted into an insulator by being oxidized, such as molybdenum and tung stcn.

2. For the gate insulating portion. silicon nitride (Si-,N.) or a multi-layer film of. for example. a lamination of SiO. and Si N may be used in place of SiO 3. The MOS construction is other than that of the MOSFET.

The present invention is applicable to any semiconductor device having an insulated gate, the manufacture of a device including the step of etching an insulating portion by employing a conductor portion as a mask. That is. it is applicable to all sorts of MOS structures of the self-alignment construction. for example. to Si gate MOSFETs. A] MOSFETs and MOS lCs including them as constituent elements.

While we have shown and described several embodiments in accordance with the present invention, it is understood that the same is not limited thereto but is susceptible of numerous changes and modifications as known to a person skilled in the art. and we therefore do not wish to be limited to the details shown and dcscribcd herein but intend to cover all such changes and modifications as are obvious to one of ordinary skill in the art.

We claim;

I. A method of manufacturing a semiconductor de vice comprising the steps of:

a. forming an insulator layer on a semiconductor substrate of a first conductivity type;

b. selectively forming a conductor layer on a part of said insulating layer; and

c. etching parts of said insulating layer on which said conductor layer is not formed and parts of said insulating layer underlying the peripheral edge portions of said conductor layer so that the latter portions project beyond the side portions of said insulator layer therebcneath; and

d. introducing impurities. of a second conductivity type opposite said first conductivity type into said substrate on opposite sides of the conductor layerinsulating layer structure to form semiconductor regions of said second conductivity type in said substrate; and then converting at least said projecting portions of said conductor layer into an insulator so that said peripheral edge portions of said conductor layer are completely converted into insulators.

2. The method according to claim 1, wherein said substrate is a silicon substrate. said insulating layer is silicon dioxide, said conductor layer is polycrystalline silicon and said step (e) comprises the step of oxidizing the surface of said polycrystalline layer to such an ex tent that the peripheral edge portion thereof is completely converted into silicon dioxide.

3. The method according to claim 2, further including the steps of (f) forming a further insulating layer covering the structure resulting from step (c); and

g. selectively providing wiring contact layers through said further insulating layer at preselected portions thereof.

4. The method according to claim 1, further including the steps of (f) forming a further insulating layer covering the structure resulting from step (e); and

g. selectively providing wiring electrode layers through said further insulating layer at predetermined portions thereof to contact said conductor layer and said semiconductor regions.

5. The method according to claim 1, wherein said conductor layer is made of a material selected from the group consisting of polycrystalline silicon. molybdenum and tungsten.

6. The method according to claim 1, wherein said insulating layer is made of a material selected from the group consisting of silicon dioxide, silicon nitride. and a multi-layer laminated film of silicon dioxide and silicon nitride.

7. The method according to claim 2, wherein said oxidizing step (e) is carried out at a temperature of about 940C.

8. The method according to claim 1, wherein said substrate is a silicon substrate. said insulating layer is silicon dioxide. said conductor layer is polycrystalline silicon and said step (e) comprises the step of oxidizing the surface of said polycrystalline layer to such an extent that the periphcral edge portion thereof is completely converted into silicon dioxide.

9. The method according to claim 8, further including the steps of (f) forming a further insulating layer covering the structure resulting from step (c); and

g. selectively providing wiring electrode layers through said further insulating layer at predetermined portions thereof to contact said conductor layer and said semiconductor regions. 

1. A METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE COMPRISING THE STEPS OF: A. FORMING AN INSULATOR LAYER ON A SEMICONDUCTOR SUBSTRATE OF A FIRST CONDUCTIVITY TYPE, B. SELECTIVELY FORMING A CONDUCTOR LAYER ON A PART OF SAID INSULATING LAYER, AND C. ETCHING PARTS OF SAID INSULATING LAYER ON WHICH SAID CONDUCTOR LAYER IS NOR FORMED AND PARTS OF SAID INSULATING LAYER UNDERLYING THE PERIPHERAL EDGE PORTIONS OF SAID CONDUCTOR LAYER SO THAT THE LATTER PORTIONS PROJECT BEYOND THE SIDE PORTIONS OF SAID INSULATOR LAYER THEREBENEATH, AND D. INTRODUCING IMPURITIES, OF A SECOND CONDUCTIVITY TYPE OPPOSITE SAID FIRST CONDUCTIVITY TYPE INTO SAID SUBSTRATE ON OPPOSITE SIDES OF THE SEMICONDUCTOR LAYER-INSULATING LAYER STRUCTURE TO FORM SEMICONDUCTOR REGIONS OF SAID SECOND CONDUCTIVITY TYPE IN SAID SUBSTRATE, AND THEN E. CONVERTING AT LEAST SAID PROJECTING PORTIONS OF SAID CONDUCTOR LAYER INTO AN INSULATOR SO THAT SAID PERIPHERAL EDGE PORTIONS OF SAID CONDUCTOR LAYER ARE COMPLETELY CONVERED INTO INSULATORS.
 2. The method according to claim 1, wherein said substrate is a silicon substrate, said insulating layer is silicon dioxide, said conductor layer is polycrystalline silicon and said step (e) comprises the step of oxidizing the surface of said polycrystalline layer to such an extent that the peripheral edge portion thereof is completely converted into silicon dioxide.
 3. The method according to claim 2, further including the steps of (e) forming a further insulating layer covering the structure resulting from step (e); and g. selectively providing wiring contact layers through said further insulating layer at preselected portions thereof.
 4. The method according to claim 1, further including the steps of (f) forming a further insulating layer covering the structure resulting from step (e); and g. selectively providing wiring electrode layers through said further insulating layer at predetermined portions thereof to contact said conductor layer and said semiconductor regions.
 5. The method according to claim 1, wherein said conductor layer is made of a material selected from the group consisting of polycrystalline silicon, molybdenum and tungsten.
 6. The method according to claim 1, wherein said insulating layer is made of a material selected from the group consisting of silicon dioxide, silicon nitride, and a multi-layer laminated film of silicon dioxide and silicon nitride.
 7. The method according to claim 2, wherein said oxidizing step (e) is carried out at a temperature of about 940*C.
 8. The method according to claim 1, wherein said substrate is a silicon substrate, said insulating layer is silicon dioxide, said conductor layer is polycrystalline silicon and said step (e) comprises the step of oxidizing the surface of said polycrystalline layer to such an extent that the peripheral edge portion thereof is completely converted into silicon dioxide.
 9. The method according to claim 8, further including the steps of (f) forming a further insulating layer covering the structure resulting from step (e); and g. selectively providing wiring electrode layers through said further insulating layer at predetermined portions thereof to contact said conductor layer and said semiconductor regions. 